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Elsevier

SEM Microcharacterization of Semiconductors

  • 1 Edición, Volumen 12 - 16 de noviembre de 1989
  • Última edición
  • Editores: D. B. Holt, D. C. Joy
  • Idioma: Inglés

Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes… Leer más

Descripción

Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.

De interès para

Condensed matter physicists, surface and materials scientists, electronic and optics engineers, and solid state chemists.

Índice

Foundations of Microcharacterization in Electron Beam Instruments: D.B. Holt, An Introduction to Multi-Mode Scanning Electron Microscopy. D. Newbury, Modeling Electron Beam Interactions in Semiconductors. D.C. Joy, Channeling Patterns. D.C. Joy, The Emissive Mode and X-ray Microanalysis. Quantitation and the Interpretation of Signals in the Individual Modes: S.M. Davidson, Voltage Contrast and Stroboscopy. D.B. Holt, The Conductive Mode. O. Breitenstein and J. Heydenreich, Scanning Deep Level Transient Spectroscopy. D.B. Holt and B.G. Yacobi, Cathodoluminescence Characterization of Semiconductors. P. Balk, The Electroacoustic Mode.

Detalles del producto

  • Edición: 1
  • Última edición
  • Volumen: 12
  • Publicado: 16 de noviembre de 1989
  • Idioma: Inglés

Sobre los editores

DH

D. B. Holt

Afiliaciones y experiencia
Imperial College of Science and Technology

DJ

D. C. Joy

Afiliaciones y experiencia
University of Tennessee

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