C, H, N and O in Si and Characterization and Simulation of Materials and Processes
- 1 Edición, Volumen 56 - 1 de julio de 1996
- Última edición
- Editores: A. Borghesi, U.M. Gösele, J. Vanhellemont, A.M. Gué, M. Djafari-Rouhani
- Idioma: Inglés
Containing over 200 papers, this volume contains the proceedings of two symposia in the E-MRS series. Part I presents a state of the art review of the topic - Carbon, Hydrogen,… Leer más
Descripción
Descripción
The second part of the volume deals with a topic which is undergoing a process of convergence with two concerns that are more particularly application oriented. Firstly, the advanced instrumentation which, through the use of atomic force and tunnel microscopies, high resolution electron microscopy and other high precision analysis instruments, now allows for direct access to atomic mechanisms. Secondly, the technological development which in all areas of applications, particularly in the field of microelectronics and microsystems, requires as a result of the miniaturisation race, a precise mastery of the microscopic mechanisms.
Índice
Índice
Detalles del producto
Detalles del producto
- Edición: 1
- Última edición
- Volumen: 56
- Publicado: 1 de julio de 1996
- Idioma: Inglés
Sobre los editores
Sobre los editores
AB
A. Borghesi
UG
U.M. Gösele
JV
J. Vanhellemont
MD